Optimizing SOI Slot Waveguide Fabrication Tolerances and Strip-Slot Coupling for Very Efficient Optical Sensing
Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing.In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption Front Load Washer sensing mechanisms, in cases of low and